[mems-talk] RE: 2.5 um microchannels in SU-8 (shay kaplan)

[Herman Walgraeve - TNW]

Hi Shay,
 
I am using straight developer.
Lithography is done with a chrome mask.
 
Herman.

________________________________

Van: mems-talk-bounces at memsnet.org namens Dave
Verzonden: zo 10-6-2007 17:17
Aan: mems-talk at memsnet.org
Onderwerp: [mems-talk] RE: 2.5 um microchannels in SU-8 (shay kaplan)

Are you using straight developer from the bottle or a dilution? 2.5 microns
is pretty damn small for near UV, i bet that the lithography process is your
problem. Are you direct writing or are you using a photomask?