[mems-talk] RE: 2.5 um microchannels in SU-8 (shay kaplan)

Herman Walgraeve - TNW H.H.E.R.Walgraeve at tudelft.nl
Mon Jun 11 04:51:46 EDT 2007

Previous message: [mems-talk] RE: 2.5 um microchannels in SU-8 (shay kaplan)
Next message: [mems-talk] poly etch back for trench
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

As mentioned, the channels are about 10 um deep ; 10 - 15 um long. 

________________________________

Van: mems-talk-bounces at memsnet.org namens JBishop596 at aol.com
Verzonden: zo 10-6-2007 18:11
Aan: mems-talk at memsnet.org
Onderwerp: Re: [mems-talk] RE: 2.5 um microchannels in SU-8

How deep are your channels?

Previous message: [mems-talk] RE: 2.5 um microchannels in SU-8 (shay kaplan)
Next message: [mems-talk] poly etch back for trench
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

More information about the MEMS-talk mailing list