[mems-talk] About Cr mask dry eching

[li ling]

Dear Alls
    I wonder if anybody have the experience of making Cr mask by dry etching. We are drawing the pattern by EB on the ebr9 EB resist by it seems that it doesn't work well in dry etching with cl2 and o2. The resist is ripped off. Can anyone give us some suggestion about the resist and etching gas
    Thank you so much
               paynee
 

 
---------------------------------
Start Yahoo! Auction now! Check out the cool campaign