[mems-talk] E beam lithography-Alignment procedures !!

[madhav rao]

Hi All,
      I am currently working on E beam lithography. I
wanted to align my feature using SEM. If any one of
you has any knowledge of E beam lithography-Alignment
procedures, please let me know. 

Thanks

Regards,
Madhav.
Research Assistant,
MicroEP department,
University of Arkansas,
Fayetteville.