[mems-talk] Selective RIE etching of silicon over silicon oxide

[ameng]

Hi, WU:

I' d wonder to know what is etcher do you use? while you add HE-O2 to CL2/HBR base etch gases , the seletivity is good enough to silicon on oxide wafer. the seletivity  always higer than 50:1.  
&#212;&#218;2007-06-13&#163;&#172;"Ning Wu (nwu at Princeton.EDU)" <nwu at Princeton.EDU> &#208;&#180;&#181;&#192;&#163;&#186;
Dear all, I would greatly appreciate if someone can suggest a recipe for selective RIE etching of silicon over silicon oxide. Any selective ratio > 5 is fine with me. 

Thanks. 

Ning Wu 
The Department of Chemical Engineering 
Princeton University 
New Jersey 08544