[mems-talk] Selective RIE etching of silicon over silicon oxide

[Starzynski, John]

Wu,

	An HBr plasma will etch silicon with Si to SiO2 etch rate ratio
> 100.

John

-----Original Message-----
From: Ning Wu (nwu at Princeton.EDU) [mailto:nwu at Princeton.EDU] 
Sent: Tuesday, June 12, 2007 5:52 PM
To: mems-talk at memsnet.org
Subject: [mems-talk] Selective RIE etching of silicon over silicon oxide

Dear all,

I would greatly appreciate if someone can suggest a recipe for selective
RIE etching of silicon over silicon oxide.  Any selective ratio > 5 is
fine with me.