[mems-talk] remove SU8 dry etching

Zhang Xiao Qiang smazxq at nus.edu.sg
Thu Jun 14 00:29:59 EDT 2007


Hi, Dear collegues

I would like to remove the  SU8 dry etching after electroplating. The
thickness is about 20 micron. Do you think it is feasible? Anyone like
share your experience and recipe with me? Thanks a lot.

Thank you & have a nice day!
Best regards!

Dr. Zhang XiaoQiang

smazxq at nus.edu.sg



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