[mems-talk] Drie support wafer

[Xiaoguang Liu]

Hi Jim

What support wafer would you use? Is it silicon also? How would you prevent
the support wafer from being etched? Thanks a lot.

Best
Leo

On 6/14/07, Jim Beall <beall at boulder.nist.gov> wrote:
>
> We use a thin layer of Crystalbond 509C wax to bond Si wafers to
> backing wafers. You have to watch out for bubbles in the wax or you
> can have die pop up.
>