[mems-talk] Increasing PDMS bonding to glass without using oxygen plasma

Kevin Christ kchrist at wisc.edu
Tue Jun 19 12:04:58 EDT 2007


You could try using the corona wand method detailed here:

http://www.rsc.org/publishing/journals/LC/article.asp?doi=b610567j

I have found that the bonds it creates are generally not as strong as when using a standard plasma chamber, but it still works pretty well.

Kevin

-------------------------
Kevin V. Christ
Turner Research Group, http://ktgroup.me.wisc.edu
Department of Mechanical Engineering
University of Wisconsin, Madison
-------------------------

----- Original Message -----
From: "Virginia Abranches de Sousa R. Soares" <vsoares at inesc-mn.pt>
Date: Tuesday, June 19, 2007 10:31 am
Subject: [mems-talk] Increasing PDMS bonding to glass without using oxygen plasma
To: mems-talk at memsnet.org


> Dear Listers,
>  
>  Our plasma tool has broken down and we are looking for alternative 
> ways of  getting an irreversible bond between PDMS and glass.
>  
>  We have searched the web but so far could not find anything that 
> would not include an oxygen or an argon plasma.
>  
>  Does anybady know if there is some chemical treatment that would 
> increase the bonding strength of PDMS?


More information about the MEMS-talk mailing list