[mems-talk] About Bonding

Hanfei Wang newgenewang017 at gmail.com
Tue Jun 19 14:29:41 EDT 2007


Dear Friends,

I currently need to bond Si chips (1.5cmX1.5cm with 300nm SiO2) to another
substrate. This device should tolerate 900 degree high temperature. Does
anybody has such experience?

Thank you.
Hanfei Wang


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