[mems-talk] Smooth Side Wall Profile usin AZ-5209

[Tolga YELBOGA]

Hi;
Maybe you have done wrong anything in your recipe. After your sample was
spined, did you wait 3- 4 minutes to remove N2 in inside the resist.

Tolga YELBOGA 
Project Engineer
Nanotechnology Researh Center 
Bilkent University 
Bilkent, Ankara 06800 TURKEY 
Voice: 90-312-290-1020 
www.nanotr.bilkent.edu.tr 
-----Original Message-----
From: mems-talk-bounces at memsnet.org [mailto:mems-talk-bounces at memsnet.org]
On Behalf Of Rama Kotha
Sent: Wednesday, June 20, 2007 12:25 AM
To: mems-talk at memsnet.org
Subject: [mems-talk] Smooth Side Wall Profile usin AZ-5209

*Smooth side wall profile Using AZ 5209*

Hi,

I am trying to develop a smooth side-wall profile (of step height ~ 2um)
using AZ 5209 E positive resist.
I have tried for different exposure and development times, and have obtained
bumps along the sidewall.
Could anyone suggest me, how to obtain a smooth side wall profile without
curved edges.