[mems-talk] How to remove polymer on the sidewall after DRIE?

[G Gan]

Steve,

Do you use O2 plasma ashing process? Is this a short process? Can you give a
little bit more details? Btw, how do you know the polymers were removed?
Thanks!

Gene

On 6/25/07, swtepla at attglobal.net <swtepla at attglobal.net> wrote:
>
> Gene:
>
> Tepla has had good success in removing some sidewall polymers produced by
> the Bosch process using Microwave Plasma.