[mems-talk] Inquiry regarding sidewall deposition of wafers in e-beam metalization

polly pourus_m at rediffmail.com
Tue Jun 26 14:58:21 EDT 2007


  
Dear Sir,

i would like to know if in e-beam metallization, the sidewall (300 micron thickness face) also get coated with metal(Aluminum). Kindly also refer me some good tutorial materials in the metalization area. 

Regards
Pourus 


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