[mems-talk] How to remove polymer on the sidewall after DRIE?

[Stéphane H]

Hi,

I think an O2 plasma could be ok for you.
and possible to do in the same tool than the bosch process.
gas O2, low pressure, few minutes. (depending the aspect ratio, scallops
size..)
If you have a SEm, you can surely verify if there is some remaining
polymer.

good luck,
Bakri