[mems-talk] Isotropic silicon etch

[Chilcott, Dan W]

To All,

I am looking for a well controlled isotropic silicon etch for etching 2 um deep features. I do not believe that a timed plasma etch would be controlled enough for this application. I am looking for a control of better than 0.5 um from lot to lot and across the wafer. Any ideas?

Thanks,
Dan Chilcott