[mems-talk] Isotropic silicon etch

[David Nemeth]

How wide are your features?

-----Original Message-----
From: mems-talk-bounces at memsnet.org [mailto:mems-talk-bounces at memsnet.org]
On Behalf Of Chilcott, Dan W
Sent: Wednesday, June 27, 2007 2:03 PM
To: mems-talk at memsnet.org
Subject: [mems-talk] Isotropic silicon etch

To All,

I am looking for a well controlled isotropic silicon etch for etching 2 um
deep features. I do not believe that a timed plasma etch would be controlled
enough for this application. I am looking for a control of better than 0.5
um from lot to lot and across the wafer. Any ideas?