[mems-talk] Patterning gold on PDMS

[Yue Mun Pun, Jeffrey]

Hi,
I am trying to make a structure that makes use of the difference in thermal expansion of SU-8, PDMS and gold for actuation.  The structure consists of a cylinder of PDMS encased by a surrounding layer of SU-8.  One end of these 2 layers will be covered by a thin film of gold (100nm), while the other end will be heated up.  
Does anyone have any experience in doing standard photolithography work on PDMS?
 
Jeffrey