[mems-talk] 2" SOI wafer supplier

[Morten Aarøe]

To all,

Does anyone have any knowledge of a supplier of 2" SOI wafers. More 
specifically I need approximately 1um device layer (can be polysilicon!) 
and a couple of um buried oxide. I will need 20 such wafers.

The few replies from manufacturers I have got say that either they will 
cost 200+ EUR a piece or that they simply do not make them. I find it 
slightly annoying having to pay almost double the price of a similar 
4"/100mm wafer for something with one quarter the area.

Hope someone can help me. In the end I might have to make them on my own 
using standard 2" Si wafers (about 15-20 EUR a piece), oxidizing them 
and finally depositing a 1um layer of polysilicon on top.

Any other ideas are very welcome as well :-)

Regards,

Morten Aaroe
PhD-student
Department of Physics
Technical University of Denmark