[mems-talk] Re:PDMS on PMMA

N H neyhmor at gmail.com
Thu Jun 28 12:28:02 EDT 2007


Otherwise I think you must achieve good results only applying the same
O2 plasma procedure. PMMA is a polymer and will be oxidized by plasma
just as PDMS. Perhaps you will need to change some parameters as
pressure and time, but it must work well.
Otherwise you can try bond PDMS and PMMA with CHCl3 ... it may work,
but I give no guarantee.

Best wishes!

NH


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