[mems-talk] Isotropic silicon etch

[Chilcott, Dan W]

David,

Thank you for replying. My features are from 10 um to 30 um wide and they are oriented at different angles which eliminates the use of anisotropic etches. 

Dan Chilcott


 -----Original Message-----
From: 	mems-talk-bounces at memsnet.org [mailto:mems-talk-bounces at memsnet.org]  On Behalf Of David Nemeth
Sent:	Wednesday, June 27, 2007 3:09 PM
To:	'General MEMS discussion'
Subject:	RE: [mems-talk] Isotropic silicon etch

How wide are your features?