[mems-talk] Depositing metals onto plastics and SU-8

[Jon Fox]

I'm using resistive evaporation to put down various metals onto SU-8 and 
onto plastic substrates and am seeing significant sample heating which 
seems to be causing as little as some reflow or as much as unidentified 
hazy thin films around the sample.

I will be trying to move my metal source (resistive canoe) away from the 
sample to alleviate this, but I was wondering what the preferred method 
of depositing metals onto polymers was: resistive, e-beam bombard, or 
sputtering?

Thanks,
-Jon Fox