[mems-talk] Depositing metals onto plastics and SU-8

[Mohamad Hajj Hassan]

Hi Jon,

e-beam is the best one but the adhesion between some metals and polymers is
weak. Therefore it's better to deposit a thin interface layer such as chromium
(10 nm) or titanium.

Mohamad.



Selon Jon Fox <fox at researchsupport.com>:

> I'm using resistive evaporation to put down various metals onto SU-8 and
> onto plastic substrates and am seeing significant sample heating which
> seems to be causing as little as some reflow or as much as unidentified
> hazy thin films around the sample.
>
> I will be trying to move my metal source (resistive canoe) away from the
> sample to alleviate this, but I was wondering what the preferred method
> of depositing metals onto polymers was: resistive, e-beam bombard, or
> sputtering?