[mems-talk] Problems with evaporating Titanium

[Brent Garber]

David Nemeth wrote:
> Ti is tough to thermally evaporate.  If you can get away with Cr (also a
> good adhesion layer for gold), then something like this:
>
> http://www.lesker.com/newweb/Deposition/Evaporation_Sources/Thermal_Rods.cfm
>
> might work.  (There are other manufacturers besides Lesker).  I used these
> all the time, with good results.
>
> David Nemeth
>

I agree with David and use the Cr rods he suggests in my BOC Edwards 
Auto 306.

Brent