[mems-talk] Depositing metals onto plastics and SU-8

[Roger Shile]

Contrary to many postings here, E-beam evaporation is thermal evaporation;
the charge is not cool by any means.

Roger Shile

-----Original Message-----
From: mems-talk-bounces at memsnet.org [mailto:mems-talk-bounces at memsnet.org]
On Behalf Of Brent Garber
Sent: Thursday, March 01, 2007 11:56 AM
To: General MEMS discussion
Subject: Re: [mems-talk] Depositing metals onto plastics and SU-8

Jon,

E-beam is the coolest method. 

Brent

Jon Fox wrote:
> I'm using resistive evaporation to put down various metals onto SU-8 
> and onto plastic substrates and am seeing significant sample heating 
> which seems to be causing as little as some reflow or as much as 
> unidentified hazy thin films around the sample.
>
> I will be trying to move my metal source (resistive canoe) away from 
> the sample to alleviate this, but I was wondering what the preferred 
> method of depositing metals onto polymers was: resistive, e-beam 
> bombard, or sputtering?