[mems-talk] etch gold or lift-off?

Yitian Peng yitianp at ece.arizona.edu
Sat Mar 3 16:46:21 EST 2007


Please give some advice:
I want to fabricate the patterned gold on quartz substrate.
But the thickness of the gold is more than 1micro,
the minimum dimension of the pattern is 10 micro.
What process Should I use?? etch gold or lift-off,
Is there some problems about the two kinds of process??



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