[mems-talk] Depositing metals onto plastics and SU-8

Jesse D Fowler Jesse.D.Fowler at aero.org
Mon Mar 5 12:03:56 EST 2007


Hello original poster!

I can't find the original email about this, but if I remember properly, 
the poster wants to deposit onto un-crosslinked (unexposed SU-8). 

Something important to think about is what effect the brightly glowing 
source is going to have on your photosensitive substrate. 

I don't know if the source glows at the proper wavelength to expose SU-8, 
but I do know that it's bright enough that we don't look at it without a 
welding glass. At least, in an evaporator. 

I understand there's a glowing plasma in a sputterer, as well. But, I 
don't know how bright that is.

Is your process going to get messed up if the SU-8 is exposed by the metal 
deposition method? 
What if it's only partially exposed?

If so, you're probably going to have to do a few experiments to find a 
solution.

Sincerely,
Jesse Fowler


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