[mems-talk] Evaporating SiO2 on gold

[Michael D Martin]

Try a metal that forms a native oxide, e.g. chrome or titanium.

-Mike Martin

>>> "Leyla Soleymani" <l.soleymani at utoronto.ca> 3/5/2007 1:28 PM >>>
Hi,

I would like to use  electron beam evaporation in order to evaporate silica
on a gold substrate for isolation purposes. I have tried this but I did not
get adhesion between SiO2 and gold. Does anyone have any suggestions to what
adhesion layer and how much of it I should use in order to acheive an SiO2
layer of 100 nm on sputtered gold. I do not have a CVD system so i need to
use thermal evaporation.