[mems-talk] RIE recipe for SiO2 etching with SF6.

[ANIRBAN CHAKRABORTY]

Hello Guys,

Can anybody provide me  the RIE (SF6) etching recipe of SiO2 (2microns
thick) and any information of the etching profile of the sidewalls if I have
an inverted T-structure which is uniformly covered with 2microns of silicon
dioxide. Will the oxide layer on the sidewalls be etched too?

Thanks in advance.

-Anir