[mems-talk] Does H2O2 attack AZ5214E? Does HCL:HNO3 attack uncrosslinked SU-8

[Yue Mun Pun, Jeffrey]

Hi,
I have observed in my experiments that dilute aqua regia (3 parts HCl : 1 part HNO3 : 2 parts H2O) dissolves evaporated Gold at a rate of ~3nm/s, but etches Titanium very slowly or not at all.  Therefore Titanium can be used as an etch mask when etching Gold with this chemistry.  Also, Titanium can be dissolved with 1:2 or 1:3 NH4OH:H2O2 at a rate of 2.5nm/s, but does this chemistry does not etch Gold.
 
So in my application, I am considering etching Titanium with the HN4OH:H2O2 chemistry while masking certain parts of the Titanium with AZ5214E resist.  Does H2O2 attack AZ5214E resist?
 
Also, I intend to use Titanium as an etch mask when etching Gold with Dilute Aqua Regia.  The Gold is evaporated on patterns of crosslinked and uncrosslinked SU-8 2050.  Does the HCl and HNO3 chemicals in Aqua Regia attack uncrosslinked SU-8?
 
Can someone help to answer my queries?  Thanks a bunch!
 
Jeffrey