[mems-talk] Polymer depostion on silicon

[RSD]

Hi! 
I am looking for methods to deposit piezoelectric polymer on silicon wafer. Can anyone provide me some  information?
In first case I want to put a commercial polymer film on the silicon. After this, I also want to make a polymer film in situ (using spin coating). 
For the first case, I placed the commercial polymer film on a photoresist layer that was spin coated on the silicon wafer. This was then kept under vacuum for one hour and then the arrangement was heated for around 70 degree for 15 minutes. But, this technique did not work. Can anyone provide me some information? 

Thanks
Ravinder