[mems-talk] Wet Etching SiO2 using PMMA

[l ll]

Hi
   
  I dont think PMMA can resist HF or BOE. It certainly doesnt have resistance to flourine plasma in the RIE.
   
  Sharukh

Leyla Soleymani <l.soleymani at utoronto.ca> wrote:
  Hi,
Does anyone know if PMMA can be served as a wet etch mask for BOE of
SiO2. I have 520nm of SiO2 on Glass/Ti/Gold and I have access to
Microchem PMMA 950,000 A2. Is it possible to use the PMMA as a mask to
etch the oxide using HF. If so, does anyone know a sample procedure.