[mems-talk] Etching SiO2 and not sapphire!

[Nitin Shukla]

I have thin layer of Silicon dioxide over sapphire wafer which I want to remove off the wafer. I tried dipping in BOE/ HF but it is etching away sapphire too. I was wondering what chemical do I use to remove just silicon oxide and no sapphire.
Thanks,


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  Nitin Shukla
  PhD Candidate
  Nanoscale Energy Transport Laboratory
  Department of Mechanical Engineering
  Virginia Tech
  Blacksburg, VA 24061
  Tel No: 540-231-5579