[mems-talk] etch velocity and etchant?

yitianp at email.arizona.edu yitianp at email.arizona.edu
Tue Mar 6 20:28:32 EST 2007

Previous message: [mems-talk] Etching SiO2 and not sapphire!
Next message: [mems-talk] Meaurement of noise characteristics of microbolometers
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

Hi Everyone
  Where can I find the etch velocity and etchant??
I want to etch gold(50nm) and Cr (12nm).
Thanks

Yitian

Previous message: [mems-talk] Etching SiO2 and not sapphire!
Next message: [mems-talk] Meaurement of noise characteristics of microbolometers
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

More information about the MEMS-talk mailing list