[mems-talk] Selective etching of Chromium and Gold

[Yue Mun Pun, Jeffrey]

Hi,
I understand that dilute aqua regia (3 parts HCl : 1 part HNO3 : 2 parts H2O) can remove evaporated Gold Film.  Will this chemistry etch Chromium as well?  If I were to use 3:1 H2O:H2O2 or 3:1 HCl:H2O2 to remove Chromium, will this chemistry etch Gold as well?

Also, can I use e-beam evaporation to evaporate Chromium on uncrosslinked SU-8?  I have tried thermal evaporation of Chromium and it either does not evaporate or takes too long.

Mr. Jeffrey Mun Pun YUE
Division of Bioengineering
E3A-07-02, Nanobioanalytics Lab
7 Engineering Drive 1
National University of Singapore
Singapore 117574
Tel: (65) 65166482, Fax: (65) 68723069
E-mail:  g0500396 at nus.edu.sg