[mems-talk] hi for help about the develop

yitianp at email.arizona.edu yitianp at email.arizona.edu
Mon Mar 12 23:12:21 EST 2007

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 I spin S1813 at 4000rpm 45s.
Then hot bake 120Degree 10min
Exposure 10s, then develop 30s.After 30s, I can't see anything.
Why???
All paper recommend the develop time 30s.
Thank you
Yitian

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