[mems-talk] E-beam evaporation with Silver

Siripon Sukuabol S3057780 at student.rmit.edu.au
Wed Mar 14 00:42:24 EST 2007


HI..All,

Please advise... Anybody has ever deposited Silver (99.99%) on the silicon wafer by using E-beam evaporation machine....

Does Silver have any effects with E-beam Chamber and machine? 
For example, it makes chamber dirty and hard to clean.

Thank you for your advice.
Joe


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