[mems-talk] hi for help about the develop

[Robert Black]

1. The photoactive compound (PAC), may begin to decompose. 
2. The resin can crosslink.

I've used S1813 in the past and used a 90deg softbake.

Robert 

-----Original Message-----
From: mems-talk-bounces at memsnet.org [mailto:mems-talk-bounces at memsnet.org]
On Behalf Of yitianp at email.arizona.edu
Sent: Tuesday, March 13, 2007 7:20 PM
To: mems-talk at memsnet.org
Subject: RE: [mems-talk] hi for help about the develop

Thank you very much.
I exposed at 8.8mw/cm2 about 10s
What problem may be when the temperature is more than 100degree??

Quoting Shay Kaplan <shay at mizur.com>:

> Don't bake over 100 deg before exposure - 95 deg is better