[mems-talk] AlGaAs microbeams cleaving??

[shay kaplan]

HI
You can attached the sample to a silicon wafer with a groove or a scribe
using resist or wax. Then cleave the wafer and release the resist / wax
Shay

-----Original Message-----
From: mems-talk-bounces at memsnet.org [mailto:mems-talk-bounces at memsnet.org]
On Behalf Of vaibhav mathur
Sent: Thursday, March 15, 2007 9:26 PM
To: mems-talk at memsnet.org
Subject: [mems-talk] AlGaAs microbeams cleaving??

I've fabricated an array of 50-400 microns long,two ends clamped AlGaAs 
microbeams on GaAs substrate. Could someone suggest the best way to cleave 
these beams precisely at desired lengths to form pairs of oppositely facing 
cantilevers.Lasercutting is an expensive option, is there an alternate way 
of doing this?