[mems-talk] SU-8 on glass

[Gareth Jenkins]

The thermal conductivity of your wafer has little effect on the SU-8
baking parameters. It will be approximately the same as for silicon.
However, there are other issues relating to coating SU-8 on glass which
have been discussed in depth on this list - have a look at the archives
for more details.

Yue Mun Pun, Jeffrey wrote:
> Hi,
> Has anyone coated and baked SU-8 on borosilicate glass wafers?  Silicon has a thermal conductivity of 130W/m.K, while borosilicate glass has a thermal conductivity of 1.4W/m.K.  So for the same baking time on Silicon, glass needs about 100 times longer baking time on the hot plate.
> Can anyone advise me if I were to coat SU-8 on glass wafers?