[mems-talk] Using Chrome as etch mask

Barbara Cortese KORTESEB at libero.it
Mon Mar 19 02:19:01 EST 2007


You should correct the amount of H2O...I think 985 ml are too much!

> This is what I used to etch Cr.  It should be safe with oxide.  You need
> to check if it is OK with PMMA.  There are also commercial etchants you
> can buy.
> 
> Nichrome Etch: 155 g (NHb4)2Ce(NO3)6  (Ceric Ammonium Nitrate) + 60 ml
> HNO3 + 985 ml H2O


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