[mems-talk] Pin holes in evaporated Chromium, Titanium and Gold

[David Casale]

Pin holes are pretty common in evaporated chrome. We evap chrome on glass pretty often, and we often do two coating runs if we want to eliminated pinholes. Pinholes are much more likely to happen if the chamber and or the substrate is dirty. For instance, you are much more likely to have pinholes if you evap a single 1000 angstrom film of chrome than if you do two 500 angstrom coatings. Cleanliness is next to godliness ;)

Dave Casale
MLA

-----Original Message-----
From: Yue Mun Pun, Jeffrey [mailto:g0500396 at nus.edu.sg] 
Sent: Monday, March 19, 2007 2:20 AM
To: General MEMS discussion
Subject: [mems-talk] Pin holes in evaporated Chromium, Titanium and Gold

Hi,
I'm just wondering if anybody has observed pin holes in thermally or e-beam evaporated Chromium, Titanium and Gold.  If so, how thick do I have to evaporate these metal films for the pin holes to disappear?