[mems-talk] Chromium film as a mask for Gold wet etch

[Yue Mun Pun, Jeffrey]

Hi,
I intend to use a thin layer of Chrome (10nm) evaporated by e-ebeam on a gold film and patterned by lift-off process on 300nm gold.  Can this 10nm Chromium film be used as an etch mask for wet etching the 300nm gold film using aqua regia (assuming an isotropic undercut of 0.3 microns per side is tolerable)?
 
Also is 100nm of thermally evaporated gold film on uncrosslinked SU-8 sufficient to block UV duinr i-line photolthography processing?
 
Jeffrey