[mems-talk] Spin coating PDMS on wafer

[Kevin Christ]

Peng,

I spin roughly 50 um thick membranes on 3 inch wafers at 1500 rpm for 15 sec.  My PDMS mixture, however, contains about 4% of Dow OS-20 methylsiloxane to make spinning easier.

Kevin

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Kevin V. Christ
Turner Research Group, http://ktgroup.me.wisc.edu
Department of Mechanical Engineering
University of Wisconsin, Madison
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----- Original Message -----
From: "Peng Li (Paul)" <lip at egr.uri.edu>
Date: Monday, March 26, 2007 4:58 pm
Subject: [mems-talk] Spin coating PDMS on wafer
To: mems-talk at memsnet.org

> Dear friends,
>  
>  I want to spin coat PDMS on glass wafer to get 50um thickness layer. 
> Does
>  anybody know where can I find data of PDMS thickness corresponding to 
> spin speed?