[mems-talk] RE: Patterning Gold heaters on glass

[Jesse D Fowler]

If you've gotten desperate, here's what you do.

Since you're using gold and chrome, you can dip it in Piranha (4 parts 
H2SO4 : 1 part 30% H2O2).

Piranha does not attack chrome or gold very much. In fact, some labs use 
piranha to clean their chrome masks. 

After a minute or two, all the leftover resist should be gone. 

No guarantees are implied that this will not disturb or destroy  your 
device. 
Make sure to rinse it a good long while (5 minutes), and inspect it 
thoroughly (especially around corners) after the process.

Let us know how it turns out.

Jesse Fowler


"Yue Mun Pun, Jeffrey" <g0500396 at nus.edu.sg> 
Sent by: mems-talk-bounces at memsnet.org

Subject [mems-talk] RE: Patterning Gold heaters on glass

Hi,
Can anyone help me on this? 
 
In addition to what I did below, using ultrasonic treatment, I had also 
tried to heat the substrate in AZ300 stripper at 80-90'C and again treated 
the substrate with sonication.  Hoowever, some of the gold-coated resist 
still remain on the glass wafer.