[mems-talk] Silicon carbide wet etch

Andrea Mazzolari mazzolari at fe.infn.it
Fri Mar 30 08:54:08 EST 2007


 
Hi All,
I need to realize wet etch of silicon carbide single crystals.
Can anyone provide me informations about this? It seams that silicon carbide
it very hard to wet etch...

Best regards,
Andrea



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