[mems-talk] Alignment stage

[Ciro Chiappini]

Hi and thanks in advance
I will need to align two PDMS (or other transparent polymer) halves
with micrometric precision and then make them contact in order to
bind. at first I was thinking of using the EVG 620 aligner or any
other photolithography aligner or this purpose, but I'm concerned
about the clearance since the PDMS mold is much thicker than a wafer
and once the two halves come in contact they are permanently bound.
Also I will need to stick one of the halves to a dummy mask in order
for it to be held in place. Do any of you know about commercially
available alignment stages for this kind of purposes? I will only need
an alignment stage, since we already have plenty of microscopes for
optical visualization.

Thanks

Ciro Chiappini, Ph.D. Student
Biomedical Engineering - UT-Austin
Dr. Mauro Ferrari Nanomedicine Group