[mems-talk] 100nm coating for E-beam lith

[Gary]

Ren, we have coated 100 nm thick organic films, defect free 1 nm TIR 
variability.  The material is the viscosity of water.  I would think that 
if you used pmma thinned and cast a film of deep blue you would be very 
close to having what you need.


-----Original Message-----
From:	Ren Yang [SMTP:ren_yang at yahoo.com]
Sent:	Thursday, May 03, 2007 1:44 PM
To:	mems-talk at memsnet.org
Subject:	[mems-talk] 100nm coating for E-beam lith

Hi, All!

Is there any commerical E-beam resist can be coated to
100nm or even thinner?