[mems-talk] Exceeding 200mJ exposure for SU-8 2150 resist

Yue Mun Pun, Jeffrey g0500396 at nus.edu.sg
Thu May 3 19:59:02 EDT 2007


Hi,
I have heard on this forum that somebody mentioned that in exposing SU-8 we should not exceed 200mJ at a time.  I will be exposing SU-8 2150 at 260mJ, should I do it in 2 steps?
 
Jeffrey


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