[mems-talk] bonded wafers dice

kris crikxo at yahoo.com
Wed May 9 11:32:24 EDT 2007


Hello,

I was wondering if we can dice a Au-Au
thermocompression bonded wafer pair using the diamond
saw.

I need individual dies from the wafer pair to go for
the etch trails.

Your suggestions are highly appreciated.

Thanks,
Kris


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