[mems-talk] bonded wafers dice

Shay Kaplan shay at mizur.com
Wed May 9 11:53:08 EDT 2007


If the bond is good - no problem. If it's going to fall apart - the bond is
bad. 

-----Original Message-----
From: mems-talk-bounces at memsnet.org [mailto:mems-talk-bounces at memsnet.org]
On Behalf Of kris
Sent: Wednesday, May 09, 2007 5:32 PM
To: mems-talk at memsnet.org
Subject: [mems-talk] bonded wafers dice

Hello,

I was wondering if we can dice a Au-Au
thermocompression bonded wafer pair using the diamond saw.

I need individual dies from the wafer pair to go for the etch trails.

Your suggestions are highly appreciated.



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